4:00 PM - 4:15 PM
[12p-A302-11] Effects of applied frequency on plasma density at Torr-order pressure region in capacitively coupled plasmas
Keywords:capacitively coupled plasma, electron density, Torr-order pressure
The password has been sent to pre-registrants.
The password is also printed on the back of the name badge,
which will be enclosed with the extended abstracts DVD.
The password will be sent to all JSAP members in September 2020.