[12p-A305-1~13] 13.5 Semiconductor devices/ Interconnect/ Integration technologies

[12p-A305-7] Large-Scale Evaluation of MIM Devices Using High-Precision Current Measurement Array Test Circuit

〇Hayato Suzuki¹, Hyeonwoo Park¹, Akinobu Teramoto^2,3, Rihito Kuroda^1,3, Tomoyuki Suwa³, Shigetoshi Sugawa^1,3 (1.Grad. Sch. Eng., Tohoku Univ., 2.Res. Inst. for Nanodevice and Bio Systems, Hiroshima Univ., 3.NICHe, Tohoku Univ.)

Keywords:low current measurement, metal-insulator-metal device, test element group

We developed a large-scale evaluation technology for MIM (Metal-Insulator-Metal) devices using a high-precision current measurement array test circuit. The fabrication process consists of a common platform process and additional MIM formation process in order to fabricate and evaluate various MIM devices.