10:30 AM - 10:45 AM
[13a-B401-6] Analysis of Schottky barrier height at a metal/AlN interface
Keywords:Aluminum nitride, X-ray photoelectron spectroscopy
Oral presentation
13 Semiconductors » 13.7 Compound and power electron devices and process technology
Fri. Mar 13, 2020 9:00 AM - 11:45 AM B401 (2-401)
Kozo Makiyama(Fujitsu Lab.)
10:30 AM - 10:45 AM
Keywords:Aluminum nitride, X-ray photoelectron spectroscopy