2:45 PM - 3:15 PM
[13p-A201-4] Gap states and carrier properties in Ge2Sb2Te5 films
Keywords:phase change memory, density of states, photothermal deflection spectroscopy
Ge2Sb2Te5 thin films have been used in phase change memories. In order to improve the reliability of the memory operation, it is essential to understand the levels in the gap and the carrier characteristics affected by the high electric field. We observed weak optical absorption related to the gap states of Ge2Sb2Te5 thin films using photothermal deflection spectroscopy (PDS). We clarify the density of states of amorphous and crystalline, and consider the carrier generation mechanism.