[13p-A303-1~9] Recent progress in Advanced Ion Microscopy: Application to nano materials and devices

▲ [13p-A303-4] Optomechanical device fabrication for the light detection using focused-ion-beam processing

〇Reo Kometani¹, Penekwong Khemnat¹, Shin-ichi Warisawa¹ (1.Grad. Sch. of Front. Sci., Univ. of Tokyo)

Keywords:focused-ion-beam, chemical vapor deposition

Optomechanical device with a spiral bull’ eye antenna and a thin film Au/DLC resonator was fabricated using focused-ion-beam processing for the light detection. We demonstrated that the FIB-CVD enables us to fabricate the optomechanical device by a simple process. In addition, wavelength detection properties were evaluated using a laser with a wavelength of 1550 nm.