The 67th JSAP Spring Meeting 2020

Presentation information

Symposium (Oral)

Symposium » Recent progress in Advanced Ion Microscopy: Application to nano materials and devices

[13p-A303-1~9] Recent progress in Advanced Ion Microscopy: Application to nano materials and devices

Fri. Mar 13, 2020 1:30 PM - 5:15 PM A303 (6-303)

Reo Kometani(Univ. of Tokyo), Shinichi Ogawa(AIST)

3:00 PM - 3:15 PM

[13p-A303-4] Optomechanical device fabrication for the light detection using focused-ion-beam processing

Reo Kometani1, Penekwong Khemnat1, Shin-ichi Warisawa1 (1.Grad. Sch. of Front. Sci., Univ. of Tokyo)

Keywords:focused-ion-beam, chemical vapor deposition

Optomechanical device with a spiral bull’ eye antenna and a thin film Au/DLC resonator was fabricated using focused-ion-beam processing for the light detection. We demonstrated that the FIB-CVD enables us to fabricate the optomechanical device by a simple process. In addition, wavelength detection properties were evaluated using a laser with a wavelength of 1550 nm.