[13p-B410-1~10] Research progress on laser-induced periodic surface structure ~What has been revealed? How about the technology outlook?~

[13p-B410-5] Pulse-by-Pulse Optical Observation of Formation Process of Oblique Incidence Laser-induced Periodic Surface Structures

Kyosuke Shibata¹, 〇Shigeki Matsuo¹ (1.Shibaura Inst. Tech.)

Keywords:Laser-induced Periodic Surface Structures, Oblique Incidence, Pulse-by-Pulse Optical Observation

The formation process of the laser-induced surface periodic structure (ripple) at oblique incidence was observed for each pulse by a simple optical method. In the experiment, p-polarized Nd: YAG laser pulses with a wavelength of 1,064 nm and a pulse duration of 0.5 ns were irradiated on SUS304 substrate. At 60° incidence, the period was about 3 μm, thus the lines of ridges (grooves) were resolved by optical observation. It was observed that the connection of the lines was changing by laser irradiation.