The 67th JSAP Spring Meeting 2020

Presentation information

Poster presentation

13 Semiconductors » 13.7 Compound and power electron devices and process technology

[13p-PA9-1~25] 13.7 Compound and power electron devices and process technology

Fri. Mar 13, 2020 4:00 PM - 6:00 PM PA9 (PA)

4:00 PM - 6:00 PM

[13p-PA9-18] Analytical evaluation of 2DEG depletion voltage in polarization junction substrate

〇(B)Taihei Matsuhashi1, Takuya Hoshii1, Hiromasa Okita1, Akira Nakajima2, Kuniyuki Kakushima1, Hitoshi Wakabayashi1, Kazuo Tsutsui1 (1.Tokyo Tech, 2.AIST)

Keywords:polarization junction substrate