The 67th JSAP Spring Meeting 2020

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13 Semiconductors » 13.7 Compound and power electron devices and process technology

[14a-B401-1~11] 13.7 Compound and power electron devices and process technology

Sat. Mar 14, 2020 9:00 AM - 12:00 PM B401 (2-401)

Kenji Shiojima(Univ. of Fukui)

11:30 AM - 11:45 AM

[14a-B401-10] Evaluation of GaN-MOSFET with different gate oxide deposition methods

〇Satoshi Ikeda1, Takashi Okawa1, Hidemoto Tomita1, Atsushi Watanabe1, Yutaka Tokuda2 (1.Toyota Motor Corp., 2.Aichi Inst. of Technol.)

Keywords:GaN