4:15 PM - 4:30 PM
▲ [14p-A303-10] Improvement of ferroelectric properties of TiN/Hf0.5Zr0.5O2/Si gate stacks by inserting Al2O3 interfacial layers
Keywords:Ferroelectrics
Presentation information
Oral presentation
Code-sharing Session » 【CS.4】 Code-sharing Session of 6.1 & 13.3 & 13.5
[14p-A303-1~14] 【CS.4】 Code-sharing Session of 6.1 & 13.3 & 13.5
Sat. Mar 14, 2020 1:45 PM - 5:30 PM A303 (6-303)
Norifumi Fujimura(Osaka Pref. Univ.), Eisuke Tokumitsu(JAIST)