2:45 PM - 3:00 PM
△ [14p-A303-5] Preparation of HfO2-based ferroelectric thick film by the sputtering method at room temperature and its electrical properties
Keywords:ferroelectric film, HfO2
Presentation information
Oral presentation
Code-sharing Session » 【CS.4】 Code-sharing Session of 6.1 & 13.3 & 13.5
[14p-A303-1~14] 【CS.4】 Code-sharing Session of 6.1 & 13.3 & 13.5
Sat. Mar 14, 2020 1:45 PM - 5:30 PM A303 (6-303)
Norifumi Fujimura(Osaka Pref. Univ.), Eisuke Tokumitsu(JAIST)