The 67th JSAP Spring Meeting 2020

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Code-sharing Session » 【CS.4】 Code-sharing Session of 6.1 & 13.3 & 13.5

[14p-A303-1~14] 【CS.4】 Code-sharing Session of 6.1 & 13.3 & 13.5

Sat. Mar 14, 2020 1:45 PM - 5:30 PM A303 (6-303)

Norifumi Fujimura(Osaka Pref. Univ.), Eisuke Tokumitsu(JAIST)

3:15 PM - 3:30 PM

[14p-A303-7] Observation of (Hf,Zr)O2 thin films by scanning nonlinear dielectric microscopy

〇Hironori Fujisawa1, Seiji Nakashima1, Shinji Migita2 (1.Univ. Hyogo, 2.AIST)

Keywords:HfO2, polarization fatigue, scanning nonlinear dielectric microscopy

Ferroelectric HfO2 is one of the most promising candidate for ultra-high density FeRAMs. However, polarization fatigue still remains an issue to be addressed. Nanoscale investigation of polarization switching can help to understand and overcome the fatigue. In this study, polarization switching in (Hf,Zr)O2 thin films is observed by scanning nonlinear dielectric microscopy and will discuss the fatigue behavior.