The 67th JSAP Spring Meeting 2020

Presentation information

Oral presentation

13 Semiconductors » 13.4 Si processing /Si based thin film / MEMS / Equipment technology

[14p-A305-1~14] 13.4 Si processing /Si based thin film / MEMS / Equipment technology

Sat. Mar 14, 2020 1:45 PM - 5:30 PM A305 (6-305)

Hiroshi Ikenoue(Kyushu Univ.), Masato Sone(Tokyo Tech)

1:45 PM - 2:00 PM

[14p-A305-1] [Young Scientist Presentation Award Speech] Dependence of chlorine adsorption layer on ion energy on Ar ion-irradiated GaN surface (2)

Masaki Hasegawa1, Takayoshi Tsutsumi1, Atsushi Tanide1,2, Hiroki Kondo1, Makoto Sekine1, Kenji Ishikawa1, Masaru Hori1 (1.Nagoya Univ., 2.SCREEN Holdings Co., Ltd.)

Keywords:Gallium Nitride, Atomic Layer Etching