[14p-A305-1~14] 13.4 Si processing /Si based thin film / MEMS / Equipment technology

△ [14p-A305-12] [Highlight]A Study on Uniform Axial Sensitivities for Single Au Proof-Mass 3-axis MEMS Accelerometer with Pillar-Shaped Electrodes

〇Takashi Ichikawa¹, Ken Atsumi¹, Tatsuya Koga¹, Daisuke Yamane¹, Shin-ichi Iida², Hiroyuki Ito¹, Noboru Ishihara¹, Katsuyuki Machida¹, Kazuya Masu¹ (1.Tokyo Tech., 2.NTT-AT)

Keywords:MEMS, Accelerometer, Pillar-Shaped Electrodes

To expand the application of MEMS accelerometers, we have developed a single Au proof-mass 3-axis MEMS accelerometer. Au proof-mass MEMS accelerometers with comb or parallel-plate electrodes, which have developed as X- and Y-axis sensing electrodes, can't realize uniform sensitivities in the X, Y, and Z axes. We have proposed a pillar-shaped electrode to establish uniform sensitivities. In this work, we have investigated the relationship between axial sensitivities and the sensing areas,while introducing the analytical equation in terms of the sensitivity. In conclusion, these results confirmed that the pillar-shaped electrode will be useful for uniforming sensitivities.