[14p-A305-1~14] 13.4 Si processing /Si based thin film / MEMS / Equipment technology

△ [14p-A305-11] A Study on Single-Proof-Mass 3-axis MEMS Accelerometer
with Pillar-Shaped Electrodes

〇(M2)Ken Atsumi¹, Tatsuya Koga¹, Takashi Ichikawa¹, Daisuke Yamane¹, Shin-ichi Iida², Hiroyuki Ito¹, Noboru Ishihara¹, Katsuyuki Machida¹, Kazuya Masu¹ (1.Tokyo inst., 2.NTT-AT)

Keywords:MEMS, Acceleerometer, Pillar-Shaped Electrodes

We have developed a single-proof-mass 3-axis MEMS capacitive accelerometer. In order to realize it, we have proposed pillar-shaped electrode for X and Y axis sensing. In this work, we have investigated the possibility of applying pillar-shaped electrodes to single-proof-mass 3-axis MEMS accelerometer. We designed and fabricated the single-proof-mass 3-axis MEMS capacitive accelerometer with pillar-shaped electrodes. After evaluating the fabricated device, the experimental results showed that the capacitances were changed by input acceleration in all three axes. As a result, we confirmed that pillar-shaped electrodes will have a potential of establishing the single-proof-mass 3-axis MEMS accelerometer.