[15a-D221-1~6] 6.2 Carbon-based thin films

△ [15a-D221-1] Film Properties of Fluorocarbon Films Prepared by RF-UBMS Method with PTFE Target

〇Takafumi Toya¹, Toru Harigai¹, Koki Tamekuni¹, Hirofumi Takikawa¹, Masao Kamiya² (1.Toyohashi Univ. Technol., 2.Itoh Opt. Ind. Co., Ltd.)

Keywords:fluorocarbon film, Polytetrafluoroethylene (PTFE), RF unbalanced magnetron sputtering (UBMS) method

Polytetrafluoroethylene (PTFE) which are kind of fluorocarbon (C_xF_y) films which has excellent properties such as good water repellency and chemical resistance are widely used to field such as the automotive component industry and the semiconductor industry. In this study, C_xF_y films are fabricated by the RF unbalanced magnetron sputtering (UBMS) method with PTFE target to obtain good film adhesion. The film properties of fabricated films were analyzed.