[15a-D221-1~6] 6.2 Carbon-based thin films

[15a-D221-3] Surface-Enhanced Raman Spectroscopy of a-C:H film after defect termination with hydrogen plasma treatment

〇Miyu Furuhashi¹, Takayuki Tokoroyama², Yasuyuki Ohashi², Hiroki Kondo³, Hiroyuki Kousaka⁴, Yuya Nakashima⁵, Tatsuya Furuki⁴, Kenji Ishikawa³, Masaru Hori³, Noritsugu Umehara² (1.Gifu Univ.Grad.Sch., 2.Nagoya Univ. Grad. Sch., 3.Nagoya Univ. cLPS, 4.Gifu Univ., 5.Fuji Electric)

Keywords:Diamond-like Carbon films, Dangling bond, Surface-Enhanced Raman Spectroscopy

By irradiating hydrogenated DLC film with hydrogen plasma, it is possible to terminate defects on the surface layer of the film with hydrogen radicals. However, since ESR (Electron Spin Resonance) measurement gives the defect density of an entire film measured, the defect density in the hydrogen plasma affected layer is unknown. In this study, the depth of the hydrogen plasma affected layer was determined by Surface-Enhanced Raman Spectroscopy, being used to estimate the defect density of the affected layer. As a result, the hydrogen content of a plasma-treated film from surface to 23 nm depth increased up to almost the constant value (~38 at%) which is higher than the value (~22 at%) averaged over the entire thickness of a non-treated film. This results suggest that the defect density of the hydrogenated DLC film from surface to 23 nm film thickness can be decreased almost uniformly over the entire film thickness by irradiating hydrogen plasma.