[15a-PA5-1~25] 21.1 Joint Session K "Wide bandgap oxide semiconductor materials and devices"

[15a-PA5-24] Mist chemical vapor deposition of flexible and epitaxial wide-bandgap oxide semiconductors on synthetic mica

〇Yuta Arata¹, Hiroyuki Nishinaka¹, Kazuki Shimazoe¹, Daisuke Tahara¹, Masahiro Yoshimoto¹ (1.Kyoto Inst. of Tech.)

Keywords:oxide semiconductor, flexible, mist chemical vapor deposition