9:30 AM - 11:30 AM
[15a-PB2-21] Analysis of Temporal Variation in Wafer Temperature Distribution during Plasma Etching Processing
Keywords:wafer tempearture, plasma processing
Poster presentation
8 Plasma Electronics » 8 Plasma Electronics(Poster)
Sun. Mar 15, 2020 9:30 AM - 11:30 AM PB2 (PB)
9:30 AM - 11:30 AM
Keywords:wafer tempearture, plasma processing