The 67th JSAP Spring Meeting 2020

Presentation information

Poster presentation

8 Plasma Electronics » 8 Plasma Electronics(Poster)

[15a-PB2-1~22] 8 Plasma Electronics

Sun. Mar 15, 2020 9:30 AM - 11:30 AM PB2 (PB)

9:30 AM - 11:30 AM

[15a-PB2-3] Synthesis composite films by SiO2-PTFE sputtering

Hitoshi Sakamoto1, Eiji Sato1 (1.CC)

Keywords:PTFE, SiO2, sputtering

PTFE is an important material as biomedical polymer, because of antithrombogenic and durability. Usual method of PTFE coating has used spraying from liquid source and drying. However, spraying cannot correspond to works with complex shape and without high temperature durability . In this research, we study possibility of sputtering as a method of dry coatings. Moreover, by using a SiO2-PTFE target, we can synthesize composite films of SiO2-PTFE at room temperature. This means that SiO2-PTFE composite films may have higher biocompatibility than simple PTFE.