[15a-PB3-1~12] 13.4 Si processing /Si based thin film / MEMS / Equipment technology

▲ [15a-PB3-11] Fabrication of crystalline silicon solar cells by rapid heating with carbon heating tube

〇Ryota Seki¹, Takuma Uehara¹, Tomoyoshi Miyazaki^1,2, Go Kobayashi³, Izumi Serizawa³, Masahiko Hasumi¹, Takuji Arima¹, Toshiyuki Sameshima¹ (1.TUAT, 2.TRL, 3.ORC)

Keywords:activation