2:30 PM - 2:45 PM
[15p-A305-4] Formation of grain-boundary free Si strip and characteristics of TFTs on the Si strip
Keywords:Thin-film transistor, CLBS, Silicon
無双晶粒界(θ>5°)のSi帯にTFTを作製し，特性評価した
Presentation information
Oral presentation
13 Semiconductors » 13.4 Si processing /Si based thin film / MEMS / Equipment technology
[15p-A305-1~9] 13.4 Si processing /Si based thin film / MEMS / Equipment technology
Sun. Mar 15, 2020 1:45 PM - 4:30 PM A305 (6-305)
Akito Hara(Tohoku Gakuin Univ.), Tatsuya Okada(Univ. of the Ryukyus)