The 67th JSAP Spring Meeting 2020

Presentation information

Oral presentation

13 Semiconductors » 13.4 Si processing /Si based thin film / MEMS / Equipment technology

[15p-A305-1~9] 13.4 Si processing /Si based thin film / MEMS / Equipment technology

Sun. Mar 15, 2020 1:45 PM - 4:30 PM A305 (6-305)

Akito Hara(Tohoku Gakuin Univ.), Tatsuya Okada(Univ. of the Ryukyus)

4:00 PM - 4:15 PM

[15p-A305-8] Performance of 4T Cu-MIC poly-Ge1-xSnx TFTs and their application to inverters

Ryo Miyazaki1, 〇Akito Hara1 (1.Tohoku Gakuin Univ.)

Keywords:semiconductor, TFT, Ge