Takeshi Higashiguchi

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Speaker, Author, Co-Author

Fri. Sep 10, 2021 1:30 PM - 5:15 PM N307 (Oral)

Oral presentation
| 7 Beam Technology and Nanofabrication
| 7.1 X-ray technologies

[10p-N307-1~14] 7.1 X-ray technologies

1:30 PM - 1:45 PM

[10p-N307-1] Development of CO₂ laser-produced plasma beyond EUV source for next generation semiconductor lithography

〇Takeshi Higashiguchi¹, Ryosuke Kaneda¹, Yuto Nakayama¹, Juri Ogawa¹, Hiromu Kawasaki¹ (1.Utsunomiya Univ.)

1:45 PM - 2:00 PM

[10p-N307-2] Charge-separated energy spectra of highly charged ions from EUV source

Hiromu 1Kawasaki¹, Yuto Nakayama¹, Takeru Niinuma¹, Masaki Kume¹, 〇Takeshi Higashiguchi¹ (1.Utsunomiya Univ.)

2:00 PM - 2:15 PM

[10p-N307-3] Feasibility study of high brightness source in 6-nm spectral region

Shamit Roy¹, Yuto Nakayama¹, Hiromu Kawasaki¹, 〇Takeshi Higashiguchi¹ (1.Utsunomiya Univ.)