Hiromu Onodera

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Speaker, Author, Co-Author

Fri. Sep 10, 2021 1:45 PM - 5:15 PM N405 (Oral)

Oral presentation
| CS Code-sharing session
| 【CS.7】 Code-sharing Session of 3.15 & 4.2

[10p-N405-1~11] CS.7 Code-sharing Session of 3.15 & 4.2

4:45 PM - 5:00 PM

△ [10p-N405-10] Bonding Position Accuracy of Direct Transfer Bonding, Chip-on-wafer Bonding for III-V/Si Heterogeneous Integration

〇Hiromu Onodera¹, Kikuchi Takehiko¹, Ohiso Yoshitaka¹, Amemiya Tomohiro^1,2, Nishiyama Nobuhiko^1,2 (1.Tokyo Tech, 2.IIR)