Yoshihiro Sato

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Speaker, Author, Co-Author

Fri. Sep 10, 2021 1:00 PM - 2:00 PM S301 (Oral)

Oral presentation
| 8 Plasma Electronics
| 8.8 Plasma Electronics Division Award Speech

[10p-S301-1~2] 8.8 Plasma Electronics Division Award Speech

1:30 PM - 2:00 PM

[10p-S301-2] [Plasma Electronics Award Speech] Evaluation of plasma-induced damage in Si substrate using pn junction structures

〇Yoshihiro Sato^1,2, Satoshi Shibata¹, Keiichiro Urabe², Koji Eriguchi² (1.Panasonic Corp., 2.Kyoto Univ.)