Shinji Yamada

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Speaker, Author, Co-Author

Sat. Sep 11, 2021 9:00 AM - 12:00 PM N305 (Oral)

Oral presentation
| 13 Semiconductors
| 13.7 Compound and power devices, process technology and characterization

[11a-N305-1~11] 13.7 Compound and power devices, process technology and characterization

11:30 AM - 11:45 AM

[11a-N305-10] Suraface morphology of Si-doped GaN sputtered layer on N-polar GaN substrate

〇Shinji Yamada¹, Masanori Shirai², Hiroki Kobayashi², Ryuichiro Kamimura², Tetsu Kachi³, Jun Suda^1,3 (1.Nagoya Univ., 2.ULVAC, 3.Nagoya Univ. IMaSS)