Akira Uedono

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Speaker, Author, Co-Author

Sat. Sep 11, 2021 9:00 AM - 12:00 PM N305 (Oral)

Oral presentation
| 13 Semiconductors
| 13.7 Compound and power devices, process technology and characterization

[11a-N305-1~11] 13.7 Compound and power devices, process technology and characterization

9:30 AM - 9:45 AM

[11a-N305-3] Study of Mg activation process in Mg-implanted GaN by means of positron annihilation

〇Akira Uedono¹, R. Tanaka², S. Takashima², K. Ueno², M. Edo², K. Shima³, K. Kojima³, S.F. Chichibu³, S. Ishibashi⁴ (1.Univ. of Tsukuba, 2.Fuji Electric, 3.IMRAM-Tohoku Univ., 4.AIST)

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