Kohei Shima

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Speaker, Author, Co-Author

Sat. Sep 11, 2021 9:00 AM - 12:00 PM N305 (Oral)

Oral presentation
| 13 Semiconductors
| 13.7 Compound and power devices, process technology and characterization

[11a-N305-1~11] 13.7 Compound and power devices, process technology and characterization

9:45 AM - 10:00 AM

△ [11a-N305-4] Spatially resolved CL of p-type ion-implanted GaN using vacancy-guided Mg diffusion

〇Kohei Shima¹, Ryo Tanaka², Shinya Takashima², Katsunori Ueno², Masaharu Edo², Kazunobu Kojima¹, Akira Uedono³, Shigefusa Chichibu¹ (1.IMRAM-Tohoku Univ., 2.Fuji Electric, 3.Univ. of Tsukuba)

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