Rikuto Nakamura

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Speaker, Author, Co-Author

Sat. Sep 11, 2021 1:30 PM - 5:00 PM N304 (Oral)

Oral presentation
| 13 Semiconductors
| 13.2 Exploratory Materials, Physical Properties, Devices

[11p-N304-1~13] 13.2 Exploratory Materials, Physical Properties, Devices

2:00 PM - 2:15 PM

[11p-N304-3] Reactive Ion Etching Property of Mg₂Si Substrate Using CF₄

〇Rikuto Nakamura¹, Misa Yoshida², Daiju Tsuya², Haruhiko Udono¹ (1.Ibaraki Univ., 2.NIMS)