Kenji Okada

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Speaker, Author, Co-Author

Sat. Sep 11, 2021 1:00 PM - 6:30 PM S201 (Oral)

Symposium (Oral)
| Symposium
| Thin film / surface physics research trends and future prospects -The 50th anniversary of Thin film and surface physics division-

[11p-S201-1~8] Thin film / surface physics research trends and future prospects -The 50th anniversary of Thin film and surface physics division-

1:30 PM - 2:00 PM

[11p-S201-2] Physics of Dielectrics and its Interface Supporting Semiconductor Devices
~ 26 years in Workshop on Electron Device Interface Technology ~

〇Kenji Okada¹ (1.Tower Partners Semiconductor)