tomomu yamazaki

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Speaker, Author, Co-Author

Sun. Sep 12, 2021 9:00 AM - 12:00 PM N304 (Oral)

Oral presentation
| 13 Semiconductors
| 13.5 Semiconductor devices/ Interconnect/ Integration technologies

[12a-N304-1~11] 13.5 Semiconductor devices/ Interconnect/ Integration technologies

11:15 AM - 11:30 AM

[12a-N304-9] Chemical composition change at ALD-HfO₂/PVD-WS₂ interface

〇tomomu yamazaki¹, ryo ono¹, shinya imai¹, takuya hamada¹, masaya hamada¹, iriya muneta¹, kuniyuki kakushima¹, hitoshi wakabayashi¹ (1.Tokyo Tech.)