Kenji Shiojima

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Speaker, Author, Co-Author

Sun. Sep 12, 2021 9:00 AM - 11:45 AM N305 (Oral)

Oral presentation
| 13 Semiconductors
| 13.7 Compound and power devices, process technology and characterization

[12a-N305-1~10] 13.7 Compound and power devices, process technology and characterization

11:30 AM - 11:45 AM

[12a-N305-10] Uniformity characterization of SiC, GaN, and a-Ga₂O₃ Schottky contacts using scanning internal photoemission microscopy

〇Kenji Shiojima¹, Yuto Kawasumi¹, Fumimasa Horikiri², Noboru Fukuhara², Tomoyoshi Mishima³, Takashi Shinohe⁴ (1.Univ. of Fukui, 2.SCIOCS, 3.Hosei Univ., 4.FLOSFIA)