Takuma Kobayashi

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Speaker, Author, Co-Author

Sun. Sep 12, 2021 9:00 AM - 11:45 AM N305 (Oral)

Oral presentation
| 13 Semiconductors
| 13.7 Compound and power devices, process technology and characterization

[12a-N305-1~10] 13.7 Compound and power devices, process technology and characterization

10:45 AM - 11:00 AM

△ [12a-N305-7] Selective introduction of color centers into 4H-SiC via ion implantation and annealing

〇Takuma Kobayashi^1,2, Maximilian Ruehl¹, Johannes Lehmeyer¹, Leonard Zimmermann¹, Michael Krieger¹, Heiko Weber¹ (1.FAU, 2.Osaka Univ.)