Yuki Kamochi

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Speaker, Author, Co-Author

Sun. Sep 12, 2021 9:45 AM - 12:00 PM N323 (Oral)

Oral presentation
| 13 Semiconductors
| 13.4 Si processing /Si based thin film / MEMS / Equipment technology

[12a-N323-1~8] 13.4 Si processing /Si based thin film / MEMS / Equipment technology

11:00 AM - 11:15 AM

[12a-N323-5] Boron Doping Method using BCl₃ gas for Silicon Minimal CVD

Atsuhiro Motomiya¹, 〇Yuki Kamochi¹, Hitoshi Habuka¹, Shin-ichi Ikeda^2,3, Yuuki Ishida^2,3, Shiro Hara^2,3 (1.Yokohama National Univ., 2.MINIMAL, 3.AIST)