Oral presentation
13 Semiconductors » 13.4 Si processing /Si based thin film / MEMS / Equipment technology
Sun. Sep 12, 2021 9:45 AM - 12:00 PM N323 (Oral)
Daisuke Yamane(Ritsumeikan Univ.), Shiro Hara(National Institute of Advanced Industrial Science and Technology)
△：Presentation by Applicant for JSAP Young Scientists Presentation Award
▲：English Presentation
▼：Both of Above
No Mark：None of Above
9:45 AM - 10:00 AM
〇Mana Otani1, Mitsuko Muroi1, Hitoshi Habuka1 (1.Yokohama National Univ.)
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10:00 AM - 10:15 AM
Mitsuko MUroi1, 〇Hitoshi Habuka1 (1.Yokohama National Univ.)
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10:15 AM - 10:30 AM
〇Rinsei Sya1, Hitoshi Habuka1, Harunori Ushikawa2 (1.Yokohama nat. Univ., 2.Watty Corp.)
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10:30 AM - 10:45 AM
Kenta Hori1, 〇Hiroki Kawakami1, Hitoshi Habuka1 (1.Yokohama Nat.Univ.)
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11:00 AM - 11:15 AM
Atsuhiro Motomiya1, 〇Yuki Kamochi1, Hitoshi Habuka1, Shin-ichi Ikeda2,3, Yuuki Ishida2,3, Shiro Hara2,3 (1.Yokohama National Univ., 2.MINIMAL, 3.AIST)
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11:15 AM - 11:30 AM
〇Tetsuya Goto1, Seiji Kobayashi2, Thai Cuong2, Yuki Yabuta3, Shigetoshi Sugawa1, Shiro Hara4,5 (1.NICHe, Tohoku Univ., 2.Kotec, 3.Seinan, 4.AIST, 5.Minimal)
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11:30 AM - 11:45 AM
〇Takeshi Hamamoto1, Masashi Kase2, Sommawan Khumpuang1,2, Shiro Hara1,2 (1.MINIMAL, 2.AIST)
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11:45 AM - 12:00 PM
〇kazushige sato1,3, Takashi Chiba1,3, Masao Terada1,3, Kengo Hamada1,3, Sommawan Sommawan1,2, Shiro Hara1,2 (1.MINIMAL, 2.AIST, 3.Sakaguchi E.H VOC Corp.)
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