Hansin BAE

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Speaker, Author, Co-Author

Sun. Sep 12, 2021 1:30 PM - 5:30 PM N102 (Oral)

Oral presentation
| 8 Plasma Electronics
| 8.2 Plasma deposition of thin film, plasma etching and surface treatment

[12p-N102-1~15] 8.2 Plasma deposition of thin film, plasma etching and surface treatment

4:45 PM - 5:00 PM

▼ [12p-N102-13] High conductive carbon film deposition by electron cyclotron resonance (ECR) plasma

〇Hansin BAE¹, Hamaguchi Ikumi¹, Kensuke Sasai², Haruka Suzuki^1,2, Hirotaka Toyoda^1,2,3 (1.Nagoya Univ., 2.Nagoya Univ. cLPS, 3.NIFS)