Rie Yamada

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Speaker, Author, Co-Author

Mon. Sep 13, 2021 9:00 AM - 11:30 AM S201 (Oral)

Oral presentation
| 21 Joint Session K "Wide bandgap oxide semiconductor materials and devices"
| 21.1 Joint Session K "Wide bandgap oxide semiconductor materials and devices"

[13a-S201-1~9] 21.1 Joint Session K "Wide bandgap oxide semiconductor materials and devices"

10:30 AM - 10:45 AM

[13a-S201-6] Impacts of hydrochloric acid and growth temperature on mist chemical vapor deposition growth of Ga₂O₃

〇Rie Yamada¹, Subaru Takahashi¹, Atsushi Sekiguchi¹, Takeyoshi Onuma¹, Tohru Honda¹, Tomohiro Yamaguchi¹ (1.Kogakuin Univ.)