3:45 PM - 4:00 PM
△ [13p-N101-11] Fabrication of ultra-low dislocation AlN template with tiny pits multilayer structure
〇Ryota Hidaka1, Ryo Okuno1, Taketo Kowaki1, Yongzhao Yao2, Yukari Ishikawa2, Yoshihiro Sugawara2, Daisaku Yokoe2, Hideki Hirayama3, Satoshi Kurai1, Narihito Okada1, Yoichi Yamada1, Kazuyuki Tadatomo1 (1.Grad. School of Sci. & Tech. for Innovation, Yamaguchi Univ, 2.JFCC, 3.RIKEN)