4:30 PM - 4:45 PM
△ [13p-N101-13] Reduction of pit density and surface roughness in MOVPE growth on OVPE-GaN substrates
〇Shigeyoshi Usami1, Masayuki Imanishi1, Junichi Takino2, Tomoaki Sumi2, Yoshio Okayama2, Mihoko Maruyama1, Masashi Yoshimura3, Masahiko Hata4, Masashi Isemura5, Yusuke Mori1 (1.Osaka Univ., 2.Panasonic Corp., 3.ILE, Osaka Univ., 4.Itochu Plastics Inc., 5.Sosho-Ohshin Inc.)