Kazuya Ataka

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Speaker, Author, Co-Author

Mon. Sep 13, 2021 1:00 PM - 6:00 PM N101 (Oral)

Oral presentation
| 15 Crystal Engineering
| 15.4 III-V-group nitride crystals

[13p-N101-1~18] 15.4 III-V-group nitride crystals

3:15 PM - 3:30 PM

△ [13p-N101-9] Growth of N-polar AlN using polarity inversion and pulse H₂ etching

〇Kazuya Ataka¹, Lu You¹, Wataru Matsumura¹, Kouki Hanasaku¹, Yongzhao Yao², Yukari Ishikawa², Yoshihiro Sugawara², Daisaku Yokoe², Satoshi Kurai¹, Narihito Okada¹, Yoichi Yamada¹, Kazuyuki Tadatomo¹ (1.Grad. School of Sci. & Tech. for Innovation, Yamaguchi Univ., 2.Japan Fine Ceramics Center)