Mina Sato

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Speaker, Author, Co-Author

Tue. Sep 21, 2021 9:00 AM - 10:40 AM P03 (Poster)

Poster presentation
| 1 Interdisciplinary Physics and Related Areas of Science and Technology
| 1.3 Novel technologies and interdisciplinary engineering

[21a-P03-1~7] 1.3 Novel technologies and interdisciplinary engineering

9:00 AM - 10:40 AM

[21a-P03-7] Microfabrication of Si with KOH etchant using fine mask pattern irradiated by Ar⁺ ion beam

〇Mina Sato¹, Mie Tohnishi¹, Akihiro Matsutani¹ (1.Tokyo Tech.)