Koichi Ishii

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Speaker, Author, Co-Author

Wed. Sep 22, 2021 11:00 AM - 12:40 PM P08 (Poster)

Poster presentation
| 8 Plasma Electronics
| 8 Plasma Electronics(Poster)

[22a-P08-1~11] 8 Plasma Electronics(Poster)

11:00 AM - 12:40 PM

[22a-P08-6] Measurement of Gas-Flow Rate Dependence of Incident Radicals and Ions on to the Substrate in Tetramethylsilane Plasma for Si-containing DLC films

〇Koichi Ishii¹, Shun Sasaki¹, Mao Kamiyama¹, Akinori Oda¹, Yoshiaki Watanabe², Hiroyuki Kousaka³, Takayuki Ohta⁴ (1.Chiba Inst., 2.Innovation Science Co. Ltd., 3.Gifu Univ., 4.Meijo Univ.)

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