The 82nd JSAP Autumn Meeting 2021

Session information

Symposium (Oral)

Symposium » Atomic layer processes for future device fabrication; Understanding surface reaction dynamics and its control

[11p-S301-1~7] Atomic layer processes for future device fabrication; Understanding surface reaction dynamics and its control

Sat. Sep 11, 2021 1:30 PM - 4:55 PM S301 (Oral)

Makoto Sekine(Nagoya Univ.), Jaeho Kim(AIST)

△:Presentation by Applicant for JSAP Young Scientists Presentation Award
▲:English Presentation
▼:Both of Above
No Mark:None of Above

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