[10a-N203-1~10] 15.7 Crystal characterization, impurities and crystal defects

[10a-N203-6] 3D multicrystalline Si modeling by experiments and data scientific methods
and finite element stress analysis

〇Kenta Yamakoshi¹, Kentaro Kutsukake², Takuto Kojima³, Hiroaki Kudo³, Noritaka Usami¹ (1.Grad. Eng. Nagoya Univ., 2.RIKEN AIP, 3.Grad. Info. Nagoya Univ.)

Keywords:multicrystalline Si, 3D reconstruction, stress analysis