Numerical investigation of heat removal performance for the multi-layer graphene

Presentation information

Oral presentation

13 Semiconductors » 13.4 Si processing /Si based thin film / MEMS / Equipment technology

Fri. Sep 10, 2021 1:30 PM - 5:45 PM N302 (Oral)

Wenchang Yeh(Shimane Univ.), Taizoh Sadoh(Kyushu Univ.)

5:30 PM - 5:45 PM

〇Ayano Furue¹, Satoshi Matsumoto¹, Masataka Hasegawa² (1.KIT, 2.AIST)

Keywords:multi-physics simulation