The 82nd JSAP Autumn Meeting 2021

Presentation information

Oral presentation

13 Semiconductors » 13.1 Fundamental properties, surface and interface, and simulations of Si related materials

[10p-N304-1~10] 13.1 Fundamental properties, surface and interface, and simulations of Si related materials

Fri. Sep 10, 2021 1:30 PM - 4:15 PM N304 (Oral)

Koichiro Saga(Sony), Nobuya Mori(Osaka Univ.)

2:30 PM - 2:45 PM

[10p-N304-5] Characterization of Electronic Charged States of High Density Self-aligned Si-based Quantum Dots Evaluated with AFM/Kelvin Prove Technique

〇(D)Yuki Imai1, Katsunori Makihara1, Noriyuki Taoka1, Akio Ohta1, Seiichi Miyazaki1 (1.Nagoya Univ.)

Keywords:Si-based quantum dots, AFM/KFM, Charge distribution