[10p-N401-1~10] 7.2 Applications and technologies of electron beams

△ [10p-N401-8] SEM using graphene-oxide-semiconductor type planar electron source

〇Yukino Kameda^1,2, Katsuhisa Murakami², Masayoshi Nagao², Hidenori Mimura¹, Yoichiro Neo¹ (1.Shizuoka Univ., 2.AIST.)

Keywords:graphene, electron source, SEM