The 82nd JSAP Autumn Meeting 2021

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7 Beam Technology and Nanofabrication » 7.2 Applications and technologies of electron beams

[10p-N401-1~10] 7.2 Applications and technologies of electron beams

Fri. Sep 10, 2021 1:00 PM - 3:45 PM N401 (Oral)

Masayoshi Nagao(AIST), Takafumi Ishida(Nagoya University)

3:15 PM - 3:30 PM

[10p-N401-9] Electron Emission from Planar-type Electron Source based on Nanocrystalline Silicon (II)

〇Hidetaka Shimawaki1, Katsuhisa Murakami2, Masayoshi Nagao2, Hidenori Mimura3 (1.Hachinohe Inst., 2.AIST, 3.Shizuoka Univ.)

Keywords:electron emission, planar-type, nanocrystalline silicon