9:00 AM - 9:10 AM
[11a-S301-1] Introduction
Keywords:atomic layer deposition, atomic layer etching
Presentation information
Symposium (Oral)
Symposium » Atomic layer processes for future device fabrication; Understanding surface reaction dynamics and its control
[11a-S301-1~7] Atomic layer processes for future device fabrication; Understanding surface reaction dynamics and its control
Sat. Sep 11, 2021 9:00 AM - 11:40 AM S301 (Oral)
Takeshi Momose(Univ. of Tokyo), Hiroki Kondo(Nagoya Univ.)