[12a-N104-1~10] 16.1 基礎物性・評価・プロセス・デバイス

▲ [12a-N104-2] Mechanism of Crystallization of Cat-CVD Hydrogenated n-a-Si Films on Textured Glass Substrates by FLA

〇Zheng WANG¹、Huynh Thi Cam Tu¹、Keisuke Ohdaira¹ (1.JAIST)

キーワード：Thin film silicon